Research on Integrated Circuit Manufacturing Process Thermostatic Control System
碩士 === 崑山科技大學 === 電子工程研究所 === 104 === In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermos...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33286880553700150167 |
| Summary: | 碩士 === 崑山科技大學 === 電子工程研究所 === 104 === In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermostatic control system which used PID and PLC controls refrigerant system to achieve thermostatic balance state of cooling Coolant. We use electric circuit board add in singal to simulate the problems of thermostatic control system and use Arduino microprocessor to simulate temperature diversification.
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