Thermal Stability of SnOx/AZO/Ag/NiCrOx/SnOx Each Layer in Films

• Main Authors: Chen,Hung-Jen, 陳宏仁
• Other Authors: Chang,Shang-Chou
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/09639726050422260912

碩士 === 崑山科技大學 === 電機工程研究所 === 104 === Each layer in SnOx/NiCrOx/Ag/AZO/SnOx multilayer films applied in low emissivity glass was deposited on glass by in-line sputtering. Part of the as-deposited samples was heated with 500oC usually met in toughened glass process. Micro structure, electrical, optical and emissivity properties of the as-deposited and heated films was compared. The silver films without outer layer protection change their microstructure and therefore properties. Apparent particle coalescence and grain growth were found for heated Ag/AZO/SnOx/glass samples. The surface roughness increases (from 2.79 to 31.31 nm) and the emissivity decreases to 0.32. The heated SnOx/NiCrOx/Ag/AZO/SnOx multilayer films can keep the microstructure and emissivity properties compared to as-deposited samples. The SnOx/NiCrOx films can effectively prevent changing the emissivity related properties on silver films. The heated SnOx/NiCrOx/Ag/AZO/SnOx multilayer films show 0.11 in emissivity, which is close to as-deposited samples.