The Analysis of Wafer Inspection Performance and Operators’ Visual Fatigue in WLCSP Industry
碩士 === 中原大學 === 工業與系統工程研究所 === 104 === Lithography responsible for all layouts in the wafer manufacture process which is complicated and slight. Thus, wafer inspection process plays an important role on product performance. Except Automatic Optical Inspection(AOI), another important method is operat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f3w3ym |