| Summary: | 碩士 === 長庚大學 === 電子工程學系 === 104 === Recently, pH sensors and biosensors play important roles in chemical assays and clinical analysis. Because the electrolyte-insulator-semiconductor was considered that have some advantages such as small size, high compatibility with IC fabrication and rapid response in the study of sensors. By combining with specific enzymatic membrane and immobilization of enzyme. The devices can also be promoted their ranges of applications to detecting of gene mutation.
In this thesis, we use sputter to make ytterbium titanium oxide. And an oxide layer was formed on the surface by rapid thermal annealing system. And YbTixOy sputter power 100:80 W with RTA 900°С have higher sensitivity, lower drift and lower hysteresis. This means that the sensing membrane not only has high sensitivity but also the stability operation is high. For these reasons, we used the two different techniques on the sensing membrane to immobilize the wild-type and mutation DNA. One is APTES, and the other is MPTS. They was covalent bonding to immobilize the DNA, and determination of wild-type or mutation DNA for electric quantity. The results show that the combined rate of wild-type is better than mutation DNA. From the preliminary results, this platform has high stability. The future work is to improve the accuracy and analysis the sensing error rate. In the future, expect that would have more application for biomedical sensors.
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