以田口方法探討奈米光柵結構射出成型參數最佳化之研究

• Main Authors: TSAI, BO-YAN, 蔡柏彥
• Other Authors: 謝文馨
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/66267381027270329402

碩士 === 國立中正大學 === 機械工程系研究所 === 104 === In this study, injection molding technology produces a cyclic olefin copolymer (COC) grating substrate. It defines the parameter range according to their material characteristics. Its parameters consist of melt temperature, mold temperature and injection speed. Experimental procedures consist of using Taguchi method L9 orthogonal array, and use replication as quality based. It discusses injection molding process parameters for the effect of the grating quality, and determines the best process parameters. In this study, the core for the use of electron beam lithography system of making small area of the grating, and then to measure the specific location of a grating structure produced by an atomic force microscope. The depth of the grating structure of an average of 84.050 nm. The result of this study shows that the effect of the most important process parameter for grating quality is the melt temperature, followed by mold temperature and injection speed. The contribution is between 42% and 66%, and the confidence interval is 100%; In addition, the study find that the depth of the grating is changed because of the distance from the gate position. The closer the location of the gate is, the deeper the depth of the grating will be. Key word：Injection molding、Taguchi method