| Summary: | 碩士 === 國立雲林科技大學 === 環境與安全衛生工程系 === 103 === With the rapid growth of conductor industry, the plants of semiconductor also grow skyrocket with multiple speeds, but also consume lots of water resources on the contrast. Wastewater causes water pollution, at the same time, the usage of ineffectiveness water makes more emission of industry wastewater, hence recycling wastewater becomes an important issue nowadays. Most semiconductor for wastewater treatment by chemical coagulation and membrane process, Chemical coagulation will produce sludge. Membrane process has high cost, There is a wastewater treatment which is being paid a close attention, applied by iron oxide as nanometer material. It equipped with nanometer size, with high ratio of surface and volume, excellent magnetic properties and great biocompatibility. Furthermore, the cladding technique of nanometer iron oxide is an innovative research point. Researcher adapts nanometer magnetic particles which is already prepared in the study (Fe3O4). Aim at the discussion of silica removal and magnetic particles recovered in chemical mechanical polishing (CMP) plus using embedding technology to magnetic particle. Discussing the feasibility of dealing with wastewater containing silicon, the result and the recycling which can be observed. Compare the differences between the situations that embedding (PVA/SA) before and after and the frequency of recycling.
The results showed that the preparation of the magnetic particles 4.99 g/L, pH4, themselves turbidity removal under optimal conditions up to 95%, and the recovery of up to 4 times the number of parts, the preparation of the embedding (PVA/SA) magnetic particles 4.99 g/L, pH4, PVA 8g, SA 2g, Under optimal conditions the turbidity removal efficiency of about 45%. and the recovery of up to 8 times the number of parts. For the next time there is no significant effect of recovery.
Therefore, this study prepared by the immobilized magnetic particles can be used in front-end processing CMP wastewater ,not only reduce the cost of wastewater, but also replace traditional of chemical coagulation.
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