Fabrication and Development of Self-powered Micro Pressure Sensors by Using Mono-crystalline Silicon Solar Cells as Power Sources

• Main Authors: Chi-Ju Liu, 劉繼如
• Other Authors: Shyang-Jye Chang
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/87471695903074196613

碩士 === 國立雲林科技大學 === 機械工程系 === 103 === This study is mainly to develop and fabricate a half-powered micro-pressure sensor (MPS) using mono-crystalline silicon solar cells as a power source for internet of things (IoT) application. In this study, the length, width and thickness of MPS chip fabricated successfully by the standard IC and MEMS processes are 700 μm, 700 μm and 200 μm, respectively. In addition, a 2 μm thick PECVD silicon dioxide thin film is used as the pressure sensing diaphragm which has a square size of 400 μm in length and the patterned poly-silicon thin film material doped with an ion implantation concentration of 1020 atoms/cm3 is used as the piezoresistive pressure sensing resistors, respectively. Then, the MPS chip was bonded onto a printing circuit board (PCB) and connected by wire-bonding. Finally, a commercial mono-crystalline silicon solar cell module connected in series with a regulator circuit can provide a output power of 0.5 V under an illumination with an incident light intensity range of 200-1000 W/m2 are used as a power source of MPS. The half-powered MPS was then completed. In the present work, after a static calibration process of MPS, the zero offset, sensitivity, root mean square (Rsqr) of best fit straight line (BFSL) and hysteresis of MPS made are 3.1 mV, 0.005954 mV/mmHg, 0.998 %VFS and 1.54 %VFS, respectively.