Influence of nucleation layer on the conductivity of diamond films synthesized by bias-enhanced microwave plasma CVD process
碩士 === 淡江大學 === 物理學系碩士班 === 103 === Diamond films possess high hardness, god tribological properties, superb electron field (EFE) properties and high thermal conductivity. They have great potential for applications such as electron field emitters, microelectromechanical devices, biomaterials, surfac...
Main Authors: | Hsin-Tse Chang, 張信澤 |
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Other Authors: | I-Nan Lin |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/77603278460589372884 |
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