Research of Energy Consumption by Outdoor Infiltration Quantity and Negative Pressure in Cleanroom Supply Air Plenum

• Main Authors: Jin-Sin Du, 杜錦鑫
• Other Authors: 胡石政
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/7xmrbx

碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 103 === Taiwan computer appliances and audiovisual electronic manufacturing industries use 43.9 billion kWh of electricity, which takes up 17.5% of all the electricity usage in Taiwan. This shows that it has a big potential in terms of energy conservation. Semiconductor manufacturing industry needs to maintain high-cleanness, and fixed temperature and humidity. The facility system takes up half of the energy of the entire factory, and air conditioning system takes up 35% of the entire electricity consumption of the factory. Within air conditioning, bringing outside air to the required conditions takes up the most energy. For cleanrooms in Taiwan, they use MAU+FFU+DCC air conditioning system, but this system leads to the fact that the supply air plenum will be under negative pressure. As the outdoor air condition in Taiwan during summer is high temperature and high humidity. If there is any failure in terms of air impermeability, unprocessed outside air will affect the fixed temperature and humidity environment. This research uses the feature of mandatory return air of FDCU system to adjust the pressure of supply air plenum and control leak area. In addition, it collects the annual hour-by-hour weather condition of Hsinchu. It uses environmental control air handling unit to simulate outside air infiltration to analyze the effect on energy consumption. The results tell us that: (1) pressure change in supply air plenum causes the imbalance of the cleanroom air condition. This causes the biggest air conditioning load difference to be 1.7kW (7.0%) compared to the cases which have leakage to base case. (2) Infiltration area has no obvious difference on air conditioning load, the biggest air conditioning load difference is 1.26kW(5.2%) compared to the cases which have leakage to base case. (3) Outside air condition change has no obvious effect on FDCU air conditioning load. The biggest MAU air conditioning load difference is 14.51kW. (4) Overall air conditioning load difference under same weather condition is from -0.41kW to 1.59kW (-2.52% to 7.06%). The main reason is because outside air infiltration, causing imbalance of the cleanroom status. This causes the air conditioning load of MAU increases by 0.14%-11.63%.