Texture and physical characterization of BiFeO3 thin films with different underlayers
碩士 === 東海大學 === 應用物理學系 === 103 === In this present work, BiFeO3 (BFO)thin films with 200 nm in thickness were deposited on both glass and SiO2/Si(100) substrates by rf magnetron sputtering. Structure and ferroelectric properties of BFO films with different underlayers have been investigated. The exp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94859663987512800897 |