Vibration Measurement Based on Angle-deviation Method and Heterodyne Phase Detection

• Main Authors: Jia-Ze Shen, 沈家澤
• Other Authors: Ming-Hung Chiu
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/hvgzgv

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 103 === In this study, we propose a vibration measurement method based on angle-deviation method and heterodyne phase detection. We can achieve a small vibration of the test sample by measuring the phase difference between s- and p-polarizations of the test beam in multiple reflections. The phase shift due to the vibration is proportional to the amplitude of variation. Using the common-path heterodyne interferometry can achieve the amplitude and frequency of the vibration. The method has some merits, for example, a simple optical setup, high resolution, high sensitivity, rapid measurement, and high stability and so on. Its feasibility is demonstrated. This phase resolution is 5.902° and the available measurement of angle displacement is 0.021°. In vibration frequency range of 1-500Hz, the error percentage are 1.66% for 1- 200Hz and 0.24% for 210-500Hz.