The study of ITO/Ti/ITO and ITO/TiN/ITO complementary resistive switching devices
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 103 === In this study, we used titanium (Ti)、titanium nitride(TiN) and indium tin oxide (ITO) as the electrodes to fabricate the ITO/Ti/ITO and ITO/TiN/ITO tri-layer stacking structure. With an anneal process interfacial layer will be formed at TiN(Ti)/ITO and ITO/Ti...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/68695705056002410887 |