| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === Bulk metallic glasses (BMGs) have exhibited high strength, low surface energy and superior glass-forming ability. Therefore, BMGs have been considered to replicate molds for micro/nano forming applications. The aim of this study is to apply micro/nano imprint technology and BMGs to fabricate hybrid micro and nano structure BMG molds. The mold can be used to form polymer devices with hybrid micro and nano structures, for examples micro grating and lens arrays with antireflective nanostructures on their surfaces, in single imprint process.
In this research, Mg58Cu31Gd11 metallic glass was applied to thermal imprint process to fabricate hybrid structures. The forming characters and operating parameters were studied by using electroformed Ni molds to fabricate micro or nano structures on Mg-base BMG substrates. Then, a mm scale lens array mold fabricated by CNC machines was used to imprint the substrates twice to generate the hybrid structures. For fixing the mold and substrate to align the hybrid structures and prevent the sliding between the mold and substrate during the imprint process, a special holder, including the stamp align kit, lower mold and upper supporting frame, was designed and fabricated by CNC machines. It was found that the diameter and depth of the micro/nano structures fabricated in the first imprint could be changed after the second imprint. A theoretical simulation was performed and showed the same trend as the experimental results.
The study proves bulk metallic glasses can be imprinted repeatedly to achieve work pieces with hybrid micro/nano structures. Using this process, bulk metallic glass molds with hybrid structures could be fabricated for thermal imprint process and used to manufacture special designed products with multi scale features in the future.
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