| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === This study compares four different polymer materials as wire guides in wire sawing process. The four materials are EPOXY, Polyurethane (PU), PU reinforced by nano-TiO2, and PU reinforced by nano-Graphite. Polyurethane has good damping property and wear resistance. This is the reason why the industries wire guides. In order to enhance the performance of wire sawing, this study investigated wire sawing process with the guides made of these four materials. The wear of wire guides was observed by optical microscope and quantified by image process. In addition, the surface roughness silicon chip was measured. The results show the PU reinforced by nano-TiO2 was outperformed in wear resistance, although the surface roughness was slightly worse than PU reinforced by nano-Graphite. Therefore, PU/TiO2 has the potential to improve the performance of wire sawing process.
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