Fabrication of an electric-driving micro channel for physiological test
碩士 === 國立臺灣科技大學 === 電子工程系 === 103 === Micro Electro Mechanical System (MEMS) grow fast due to the progress of the technology of semiconductors in recent years. Micro-channel which is a part of MEMS is the topic in this study. In previous reports usually use the glass or silicon wafer as the substrat...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02284076045265519037 |