Fabrication of an electric-driving micro channel for physiological test

• Main Authors: LIN CHENG XIAN, 林承賢
• Other Authors: none
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/02284076045265519037

碩士 === 國立臺灣科技大學 === 電子工程系 === 103 === Micro Electro Mechanical System (MEMS) grow fast due to the progress of the technology of semiconductors in recent years. Micro-channel which is a part of MEMS is the topic in this study. In previous reports usually use the glass or silicon wafer as the substrate, but we replace it by polyethylene terephthalate (PET) due to its practicality. Fabricating an electric-driving micro channel with two-step enzymatic reaction on the PET substrate is the target in this study. Some previous research shows the active or passive methods to actuate the fluid in the micro-channel, such as siphon theory, membrane pump, diffuser pump and electrowetting, etc. We combine the active and passive methods to fabricate the micro channel, and the micro-channel is fabricated in three regions . Firstly, the sample liquid is dragged into the first region of micro-channel owing to the siphon theory, and then it is blocked by the barrier layer. After the sample liquid and the enzymatic react sufficiently, we drive the sample liquid to second region for the second-step enzymatic reaction, and then use the same method to drive the sample liquid to the third region for the uniform of the reaction. Lastly, we use the optical examination to measure the volt value. We expect that we can do different physiological test by using the electric-driving micro-channel.