Rapid Atmospheric-Pressure-Plasma-Jet Sintered Nanoporous Y2O3/Carbon Nanotube Composites

• Main Authors: Chih-Hung Wu, 吳志鴻
• Other Authors: 陳建彰
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/08549742971747700588

碩士 === 國立臺灣大學 === 應用力學研究所 === 103 === We developed an ultrafast sintering process for a conductive low-pressure-plasma-resistant Y2O3/carbon-nanotube composite using an atmospheric pressure plasma jet. The processing time can be as short as 3 to 5 s. The incorporation of carbon nanotubes (CNTs) significantly improves the conductivity. N2 APPJ reacts violently with the CNTs and carbonaceous materials in the screen-printed pastes, rendering ultra-short processing. However, the synthesized films show great erosion resistance to low-pressure CHF3 inductively coupled plasma (ICP). The conductivity remains in similar level after exposing to the CHF3 ICP for 30 min. This coating can serve as a protection layer in low-pressure plasma environment. The high conductivity (>0.01 S cm-1) is advantageous in preventing arcing or charging effects in the low-pressure plasma environment.