Multiphysics Modeling and Analysis of Heat Transfer of Wafer on Electrostatic Chuck
碩士 === 國立臺灣大學 === 應用力學研究所 === 103 === The complete heat transfer path on the AlN and Al2O3 electrostatic chuck (ESC), which were utilized under the various operational conditions, is studied for the potential improvement on the temperature uniformity of the 12-inch wafer. In addition, an identical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94017791514088102106 |