Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
博士 === 國立臺灣大學 === 應用力學研究所 === 103 === This research developed a microaccelerometer via Computer-Aid-Design(CAE) and Micro Electro Mechanical Systems(MEMS) with high performance in linearity and cross-axis sensitivity. Unlike the conventional sensing elements which are always embedded at the position...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87260480248047612894 |