Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity

博士 === 國立臺灣大學 === 應用力學研究所 === 103 === This research developed a microaccelerometer via Computer-Aid-Design(CAE) and Micro Electro Mechanical Systems(MEMS) with high performance in linearity and cross-axis sensitivity. Unlike the conventional sensing elements which are always embedded at the position...

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Main Authors: Yu-Tzong Ning, 甯煜宗
Other Authors: Tzong-Shyan Wung
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/87260480248047612894
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spelling ndltd-TW-103NTU054990122015-10-14T00:41:09Z http://ndltd.ncl.edu.tw/handle/87260480248047612894 Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity 高線性度與低跨軸敏感度之懸浮壓阻式垂直平板型加速度感測器研發 Yu-Tzong Ning 甯煜宗 博士 國立臺灣大學 應用力學研究所 103 This research developed a microaccelerometer via Computer-Aid-Design(CAE) and Micro Electro Mechanical Systems(MEMS) with high performance in linearity and cross-axis sensitivity. Unlike the conventional sensing elements which are always embedded at the position of maximum displacement, the present study situated the sensors at the locations where the maximum displacements of the structure are generated in order to raise up the maximal output than the former. The core elements of accelerometer includes a vertical, double-ended flexural beam, a proof mass integrated at the middle section of the beam, and four suspended piezoresistors fixed at the mass block and across the trenches to the anchor pads. The mass block had maximum displacements of the dynamic structure which would activate the sensors to deliver maximal output. It was simulated by numerical method to analyze how much and where the maximal stress would be. The sensing chip was fabricated on a silicon-on-insulator(SOI) wafer through MEMS processes and installed by Dual-In-Package. The accelerometer was placed on a rate table that provided stable centrifugal acceleration up to approximately 3000 G for quasi-static testing. The output voltage of the accelerometer was digitized and radiofrequency transmitted for remote data acquisition. The natural frequency was about 232.4 kHz from mode analysis. After numerous experiments, the correlations for the individual runs showed that the accelerometer had a sensitivity of 3.0015 μV/Vexc/G with extraordinary performance. The best linearity of the sensing output was only 0.11% of full scale output (FS, or 59 dB), as deduced from the average standard deviation of all test runs. The average of the maximum reading deviations from the corresponding correlated curves was approximately 0.26% FS. Moreover, the cross-axis sensitivity for the two orthogonal directions nearly vanished in the test range. With the high rigidity of the microstructure, the accelerometer exhibited an ultra high performance factor of 25.8 x 10^6 MHz. The accelerometer possessed exceptional sensitivity, linearity, and repeatability, and extremely low cross-axis interference and noise. Tzong-Shyan Wung 翁宗賢 2015 學位論文 ; thesis 59 zh-TW
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description 博士 === 國立臺灣大學 === 應用力學研究所 === 103 === This research developed a microaccelerometer via Computer-Aid-Design(CAE) and Micro Electro Mechanical Systems(MEMS) with high performance in linearity and cross-axis sensitivity. Unlike the conventional sensing elements which are always embedded at the position of maximum displacement, the present study situated the sensors at the locations where the maximum displacements of the structure are generated in order to raise up the maximal output than the former. The core elements of accelerometer includes a vertical, double-ended flexural beam, a proof mass integrated at the middle section of the beam, and four suspended piezoresistors fixed at the mass block and across the trenches to the anchor pads. The mass block had maximum displacements of the dynamic structure which would activate the sensors to deliver maximal output. It was simulated by numerical method to analyze how much and where the maximal stress would be. The sensing chip was fabricated on a silicon-on-insulator(SOI) wafer through MEMS processes and installed by Dual-In-Package. The accelerometer was placed on a rate table that provided stable centrifugal acceleration up to approximately 3000 G for quasi-static testing. The output voltage of the accelerometer was digitized and radiofrequency transmitted for remote data acquisition. The natural frequency was about 232.4 kHz from mode analysis. After numerous experiments, the correlations for the individual runs showed that the accelerometer had a sensitivity of 3.0015 μV/Vexc/G with extraordinary performance. The best linearity of the sensing output was only 0.11% of full scale output (FS, or 59 dB), as deduced from the average standard deviation of all test runs. The average of the maximum reading deviations from the corresponding correlated curves was approximately 0.26% FS. Moreover, the cross-axis sensitivity for the two orthogonal directions nearly vanished in the test range. With the high rigidity of the microstructure, the accelerometer exhibited an ultra high performance factor of 25.8 x 10^6 MHz. The accelerometer possessed exceptional sensitivity, linearity, and repeatability, and extremely low cross-axis interference and noise.
author2 Tzong-Shyan Wung
author_facet Tzong-Shyan Wung
Yu-Tzong Ning
甯煜宗
author Yu-Tzong Ning
甯煜宗
spellingShingle Yu-Tzong Ning
甯煜宗
Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
author_sort Yu-Tzong Ning
title Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
title_short Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
title_full Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
title_fullStr Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
title_full_unstemmed Development of a vertical-plate-type Microaccelerometer with Suspended Piezoresistors Characterizing High Linearity and Low Cross-axis Sensitivity
title_sort development of a vertical-plate-type microaccelerometer with suspended piezoresistors characterizing high linearity and low cross-axis sensitivity
publishDate 2015
url http://ndltd.ncl.edu.tw/handle/87260480248047612894
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