Fabrication and Characterization of Ge and GeSnMISCAPs

碩士 === 國立臺灣大學 === 電子工程學研究所 === 103 === Recently, semiconductor industry technology has followed the path of scaling trend based on Moore’s Law. But conventional planar Si MOSFETs is approaching its fundamental scaling limits. For the continuation of the scaling trend, high mobility materials have be...

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Bibliographic Details
Main Authors: Tzu-Yao Lin, 林子堯
Other Authors: Chee-Wee Liu
Format: Others
Language:en_US
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/18272669741249640823