A Study of Thermal Imaging System with 128x128 Pixels Pyroelectric Film Infrared Array Sensors and Microcontroller Unit
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 103 === This study uses the photolithography and etching process, along with the sputtering system, to manufacture the MEMS of metal-oxide semi-structured array infrared sensor element. The process of devices include the deposition oxide layer process, source and drain...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/4w25j8 |