Synthesis and characterization of large area graphene by chemical vapor deposition

碩士 === 國立臺南大學 === 材料科學系碩士班 === 103 === Due to its layer structure and electrical characteristics, graphene has been attracting many researchers. Synthesis of large area graphene is important for its applications. Graphene produced by exfoliating highly order graphite can only provide small size piec...

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Bibliographic Details
Main Authors: Ming-Kai Chang, 張明凱
Other Authors: Hung-Yi Lin
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/cjh482
Description
Summary:碩士 === 國立臺南大學 === 材料科學系碩士班 === 103 === Due to its layer structure and electrical characteristics, graphene has been attracting many researchers. Synthesis of large area graphene is important for its applications. Graphene produced by exfoliating highly order graphite can only provide small size pieces. Many people try to use chemical vapor deposition (CVD) method to synthesis graphene due to its ability to produce large area thin film. In this research, we utilize copper foil as a substrate and introduce a thin oxidation layer on the top to synthesis large area graphene with CVD. The result is promising. The Raman spectroscopy is used to analyze the quality of graphene. Several methods for graphene transfer are studied including UV pretreated poly (methyl methacrylate) (PMMA) transfer method. Finally, we make a ribbon graphene with electron beam lithography. The field-effect of the ribbon graphene is observed. According to the current-voltage data, the mobility of ribbon graphene is 436.78 cm2/Vs.