Measurement of residual stress of ZrN thin film by using average X-ray strain method combined with nano-indentation
碩士 === 國立清華大學 === 工程與系統科學系 === 103 === The purpose of this study is to utilize average X-ray strain (AXS) method combined with nano-indentation to accurately measure the residual stress of ZrN thin film and to find out the limit thickness of our method. The goal is to verify that AXS method could ov...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/09060530255380852911 |