STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS

碩士 === 國立清華大學 === 動力機械工程學系 === 103 === 因申請專利緣故，資料延後公開

Bibliographic Details
Main Authors:	Wu, Yen Ting, 吳彥葶
Other Authors:	Wang, Wei Chung
Format:	Others
Language:	zh-TW
Published:	2015
Online Access:	http://ndltd.ncl.edu.tw/handle/rngk38

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record_format	oai_dc
spelling	ndltd-TW-103NTHU53111222019-05-15T22:18:04Z http://ndltd.ncl.edu.tw/handle/rngk38 STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS 不同厚度薄膜應力之分析 Wu, Yen Ting 吳彥葶碩士國立清華大學動力機械工程學系 103 因申請專利緣故，資料延後公開 Wang, Wei Chung 王偉中 2015 學位論文 ; thesis 181 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 動力機械工程學系 === 103 === 因申請專利緣故，資料延後公開
author2	Wang, Wei Chung
author_facet	Wang, Wei Chung Wu, Yen Ting 吳彥葶
author	Wu, Yen Ting 吳彥葶
spellingShingle	Wu, Yen Ting 吳彥葶 STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
author_sort	Wu, Yen Ting
title	STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
title_short	STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
title_full	STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
title_fullStr	STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
title_full_unstemmed	STRESS ANALYSIS OF DIFFERENT THICKNESS THIN FILMS
title_sort	stress analysis of different thickness thin films
publishDate	2015
url	http://ndltd.ncl.edu.tw/handle/rngk38
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