| Summary: | 碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 103 === CrN/AlN multi-layer coatings perform excellent wear, oxidation resistance properties and high hardness, respectively.The multilayer coatings can improve the problem of fracture toughness, effectively increase the fracture toughness and to hardness.In industrial applications, continuous stamping, die under the reciprocating dynamic loading cause decrease life of the punch. A sputtering punch can improve the tool life because the rasing of impact resistance .In this study, properties of CrN / AlN multi-layer coatings deposited by the unbalanced magnetron sputtering on a silicon substrate and the high-speed steel SKH51 sputtering were investigated. First, the Cr-N coatings in three different nitrogen flow rate at 24%, 40% and 56%, were to investigate three impact resistence and choosed a better parameter. Second, the CrN / AlN multi-layer experiments were carried out to observe the effect of multi-strengthening impact resistance properties.In sputtering CrN / AlN multilayer coatings process, experimental parameters were ion bombardment bias at -300V, the substrate bias voltage at -50V, chromium and aluminum target current at 5A, the operating frequency at 150KHz, working distance at 11cm, nitrogen the flow rate of the total gas flow rate at 40%. The intermediary layer material used was Cr to enhance the adhesion of substrates. Cycles experiments for controlling number of cycles were progressed by 1,5 and 10 cycles of rotation.The results showed that the impact resistance of coatings archived 120,000 times by number of cycles at 5 as well as CrN surface materials. Meanwhile, X-ray diffraction analysis showed that the phase surface Cr2N phase.Cr2N phase improve the impact resistance of CrN/AlN multi-layers coatings effectively.
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