Study the properties of TiN/CrN multi-layer coatings via unbalanced magnetron sputtering process

• Main Authors: Yi-Jhih Lin, 林奕志
• Other Authors: Yu-Sen Yang
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/06590552898998101555

碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 103 === TiN/CrN multi-layer coatings perform excellent wear and corrosion resistance as well as high hardness. The applications of these coatings are mainly for toolings, mold and die industries with the enhancement of wear resistance and hardness. Meanwhile, for the plastic injection molds, the coatings can improve the tribology morphology within open and shut actions in injection process. This study presents a improvement of characteristics of TiN/CrN multi-layer coatings with various period number of deposition operation on 304 stainless steel,high-speed steel JIS SKH51 and silicon wafers Si(100) via unbalanced magnetron sputtering process, and to investigate the effect of different period number with multilayer of each porperty. The experimental results show that period number increases, many properties significantly were improved. In the hardness property, while period number increases, hardness values raised from HV25g 2247 to 4064, with period number increased from 0(monolayer) to 15. In the adhesion property, with the period number increased from 0 to 15, the adhesion of the film can be effectively improved, the period number at 15 period has the best adhesion properties with critical load 150 N. In the wear resistance property, the wear rate performed from 5.58E-05 to 6.73E-06 (mm3．N-1．m-1), with the period number increased from 0 to 15. In the sheet resistance property, with the period number increased from 0 to 15. The sheet resistance raised from 189 mΩ/□ to 610 mΩ/□. In the water contact angle property, when period number is different, the water contact angle of coatings exhibited no any change , the results show that the water contact angle is influence by outer layer of coatings, not interlayer contents.In the corrosion resistance property, first, electrochemical tests were used to prove that single layer CrN film has better corrosion resistance than single layer TiN film. Afterward, immersion tests were used to observe multi-layer coatings with TiN outer layer material, the weight loss and corrosion rate will decrease with period number increase. Additionly, when outer layer material is CrN , the results show that the opposite trend. In the heat treatment property, while period number increased ,the situation of flaking will be reduce. In summy, the hardness, the adhesion, the sheet resistance, the wear resistance and the corrosion resistance properties of TiN/CrN multi-layer coatings can be improved with the increase of period number. Meanwhile, the water contact angle has no influence, because the same outer layter and surface energy.