The Design and Fabrication of Miniature Polymer Bistable Mechanism for MEMS

• Main Authors: Shih-Wei Shih, 施士偉
• Other Authors: Wen-Cheng Kuo
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/51828854106809078871

碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 103 === With electronics technology industry continues to pursue miniaturization of structural and maximize the effectiveness of the process, development and design of micro parts has become the target of the development of related industries, in this study, instead of tradition silicon bistable beams, a novel material combined silicon with Parylene based bistable beams has proposed for miniature bistable mechanism, can reduce the structural rigidity, used in precision instruments or in the field of MEMS systems, contribute to bistable structure. Parylene is deposited as thin film, and cannot be used as a structural material. however, if Parylene is repeatedly deposited and its top layer is removed, a high-aspect-ratio Parylene structure of comb-drive actuators and the curve beam micro-bistable structure. Additionally, because the Young’s modulus of Parylene is 1/50th that of silicon, also requires significantly less drive for a position switch, reduce the number of actuators, the purpose of the structure of the small. This study designed the concept of arc length correction, use Parylene material shrinkage, calculate the material corresponding to the required length of each arc height, by modifying the mask design to pre-correction shrink error, improve due process issues arising from contraction of Parylene structure.Then use CoventorWare MEMS dedicated software simulation of the mechanical behavior of bistable structure, analysis bistable structure of relative relationship between the force and displacement and verify the existence of bistability. This study designed the material combined silicon with Parylene based bistable beams, the result of theory and simulation shows that the actuating force is 10% that of silicon. The number of electrothermal V-beam actuators are half of primal design.