Optimal Design of Improved Phase-shifting Microscopic Interferometer System Based on Principle Component Analysis and Hilbert transform

• Main Authors: Yan-ting Chen, 陳彥廷
• Other Authors: Wen-Jong Chen
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/48539848373900239788

碩士 === 國立彰化師範大學 === 工業教育與技術學系 === 103 === In this dissertation, the principal component analysis (PCA) and Hilbert transform (HT) was employed and used to improve and optimize the phase-shifting algorithm in microscopic interferometer. The improved phase-shifting algorithm have good robustness for environmental disturbance and de-tuning error which caused by shifting error, and compared with several traditional methods such as 5-step, pure PCA, AIA, etc. The results of simulation show that the improved phase-shifting interferometry in this thesis resist to the added salt and pepper noise. This study can reconstruct appropriate 3D surface profile and obtain higher signal to noise ratio (SNR) and peak signal to noise ratio (PSNR) relative to other methods. Finally, the reconstruction results of the phase-shifting microscopic interferometer is verified by the measurement results of AFM. The verification results show that the improved algorithm in this study reconstruct 3D surface profile appropriately rather than others.