none
碩士 === 國立中央大學 === 機械工程學系 === 103 === Metalorganic chemical vapor deposition is widely used in LED manufacturing. There are different reactor designs on the current market including TurboDisc, planetary, and close-coupled showerhead. Close-coupled showerhead reactor has good deposition uniformity and...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/32604528389801138453 |