White smoke of a semiconductor plant improvement and research of inorganic acid
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 103 === Inorganic acid gases generated white smoke is a byproduct of many processes in the electronics industry generated, including semiconductor and optoelectronics industry, due to the acidic smoke particles of inorganic particle is extremely small, so that it c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54167007350129948330 |