Distance Based Vector Quantization Algorithm for Automatic Defect Detection and Classification
碩士 === 國立交通大學 === 電控工程研究所 === 103 === In general, a reliable and automatic semiconductor fabrication processes is of great importance to product yield and cost reduction. In the past, we made use of human vision to do die defect detection and classification, which is hindered by the easy fatigue and...
Main Authors: | Tsai, Cia-Yang, 蔡家揚 |
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Other Authors: | Chang, Jyh-Yeong |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/09298426281506536411 |
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