| Summary: | 碩士 === 國立交通大學 === 電控工程研究所 === 103 === The main sensing principle is detecting the corneal deformation caused by the variations of intraocular pressure(IOP), using capacitive IOP contact lenses sensor wear on corneal. The variations of intraocular pressure will be transformed into the change of capacitance values and the values will be exported by RFID system. Reach the goals of long time, comfort, and wireless measurement.
This paper reports a study of using MEMS manufacturing technology to fabricate a flexible IOP sensor that can be embedded in a contact lens with the feasibility fabrication. The first part is the fabrication of sensing unit which is a sandwich structure which is filled by HEMA between top plate and bottom plate, using a transparent parylene C as the substrate and the insulating layer, gold as the top and bottom electrode of the capacitor electrode. The second part is the fabrication of sensor, it will be integrated by using the Flip-Chip technology to combine the sensing unit and the chip with read-out circuit, molding into contact lenses with PDMS, and curing with oven. Last, the experiment of the qualitative and quantitative of the sensor will be implemented by using isolated pig eyes and living rabbit eyes.
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