| Summary: | 碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 103 === A monolithic fingerprint pressure sensor with integrated resistance to digital readout circuit in 0.18um CMOS MEMS process is proposed to demonstrate sensor to bit integration. The sensing range of the fingerprint pressure sensor is designed from 0~1MPa and the variation of the resistance is from 23.55kΩ to 24.6kΩ, the resistance difference in sensing range is 0Ω to 1.05kΩ. The sensitivity of the pressure sensor is 1.05kΩ/MPa. The resistance value of the sensing range is readout by the resistance to pulse-width circuit to readout. We proposed the parallel processing to readout the fingerprint pressure sensors array and increase through put rate, it composed of resistance to pulse converter and time to digital converter with sensitivity 576.8(digits/ kΩ). Therefore, without any analog to digital module, the output signal can be directly interface to digital signal process by the time-to-digital converter.
In order to get the accurate value of monolithic front-end circuits, the computer aided design flow for MEMS and IC integration is used to co-simulate the and to provide comprehensive analysis of the difference between the simulation and the measurement results.
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