On Treatment of Mixed Fluoride and Chemical Mechanism Polishing Wastewater in Semiconductor Fabrication: Optimization and pH Uniformity
碩士 === 國立交通大學 === 工學院永續環境科技學程 === 103 === In the past, the Jar-test was commonly used to determine the optimal operation condition for the treatment of mixed fluoride and chemical mechanism polishing wastewater. Because the actual volume of reaction tank is larger than the Jar-test with beaker, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12653385072655309957 |