Study on New RF Power Matching State Detector of Impedance Matching Box for Plasma Chamber

• Main Authors: Yu-ShanDu, 杜育姍
• Other Authors: Jia-You Lee
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/4cjha3

碩士 === 國立成功大學 === 電機工程學系 === 103 === The purpose of this thesis is to present a radio frequency (RF) power matching state detector of impedance matching box for plasma chamber. The thesis proposed RF power detecting mechanism designing at 13.56 MHz as the impedance is 50 ohms called matching state. The main feature of the proposed RF power detecting mechanism is split the power signal into voltage and current signal, subsequently detecting their magnitude and phase information. The method of this function comprise data acquisition circuit made by voltage divider and current transformer; magnitude detecting function which is realized by power detector; phase detecting part is composed of high speed digital logic gates circuit. Moreover, the reflected power signal is detected by the conception of VSWR meter, restructuring of directional coupler, is the last step to verify the system conform to the impedance matching condition and transform these signals into power matching state information through ADC function of MCU. By means of the circuit simulation and experimental results to prove the feasibility of proposed RF power signal detection function.