Study of ITO thin film fabricated by screen-printing and application on current-conducting layer of solar cell

• Main Authors: Tsung-LunLi, 李宗倫
• Other Authors: Mau-Phon Houng
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/47467756386012909434

碩士 === 國立成功大學 === 微電子工程研究所 === 103 === Currently, the ITO thin film was manufactured by vacuum method. However, the vacuum process cost intensively.In order to achieve the production of the large-area and the reduction of the costs, we developed the ITO thin film that fabricated by the non-vacuum screen-printing technology. Our study was divided into three parts. At the first part, we obtained the dispersion stability of the nano-size ITO solution after the appropriate physical and chemical dispersing process. At the second part, we frabricated ITO thin film by the screen-printing technology and got the best conductivity and transparency of it after adjusting the appropriate pre-curing, annealing, and mesh. At the last part, we used ITO thin film as the current-conducting layer of solar cell and got the efficiency was 1.48%. After we improved the adhesion and density of the ITO particles on the textured silicon substrate, we got the highest efficiency was 3.73％.