| Summary: | 碩士 === 國立成功大學 === 微電子工程研究所 === 103 === Currently, the ITO thin film was manufactured by vacuum method. However, the vacuum process cost intensively.In order to achieve the production of the large-area and the reduction of the costs, we developed the ITO thin film that fabricated by the non-vacuum screen-printing technology.
Our study was divided into three parts. At the first part, we obtained the dispersion stability of the nano-size ITO solution after the appropriate physical and chemical dispersing process. At the second part, we frabricated ITO thin film by the screen-printing technology and got the best conductivity and transparency of it after adjusting the appropriate pre-curing, annealing, and mesh. At the last part, we used ITO thin film as the current-conducting layer of solar cell and got the efficiency was 1.48%. After we improved the adhesion and density of the ITO particles on the textured silicon substrate, we got the highest efficiency was 3.73％.
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