Fabrication of a-Si:H solar cells by hydrogen dilution method and pulsed-wave modulation plasma

碩士 === 國立中興大學 === 電機工程學系所 === 103 === In this thesis, intrinsic hydrogenated amorphous silicon (a-Si:H) thin films i-layers and p-i-n solar cells were fabricated by 13.56 MHz plasma-enhanced chemical vapor deposition (PECVD) with pulse-wave modulation plasma and hydrogen dilution (R = H2/SiH4) metho...

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Bibliographic Details
Main Authors: Chin-Ray Kuo, 郭晉睿
Other Authors: 江雨龍
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/99583739822890663829

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