Fabrication of a-Si:H solar cells by hydrogen dilution method and pulsed-wave modulation plasma
碩士 === 國立中興大學 === 電機工程學系所 === 103 === In this thesis, intrinsic hydrogenated amorphous silicon (a-Si:H) thin films i-layers and p-i-n solar cells were fabricated by 13.56 MHz plasma-enhanced chemical vapor deposition (PECVD) with pulse-wave modulation plasma and hydrogen dilution (R = H2/SiH4) metho...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99583739822890663829 |