Develop of disk type piezoelectric vacuum gauge
碩士 === 國立中興大學 === 機械工程學系所 === 103 === The paper goes on our laboratory’s the bridge PZT gauge element. the main use of piezoelectric effect and inverse piezoelectric effect theory. , and the theory of damping vibrations have structural damping effect and gas damping effect. At low gas pressure, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8ryuxh |