Low-Temperature Gas Sensing Properties of Tellurium/ Zinc- Zinc Oxide Heterogeneous Nanostructure

• Main Authors: Yan-Ting Liu, 劉彥廷
• Other Authors: Wen-jea J. Tseng 曾文甲
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/80736582364782327909

碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === In this study, tellurium (Te) nanotubes, zinc-zinc oxide (Zn-ZnO) nanostructures and Te/Zn-ZnO heterogeneous nanostructures were grown on silicon (Si) substrate by two-stage vapor transport (VS) method in a horizontal high-temperature tube furnace. For the Te/Zn-ZnO heterostructure, the Zn-ZnO nanostructures were grown on Te nanotubes. Process conditions, including substrate temperature of the source and the deposition sides, gas flow rate and concentration, pressure in the quartz tube, hold temperature and time, were varied. Best process parameters were determined from morphology and composition obtained. Scanning electron microscopy (SEM) was used to examine the morphology, while X-ray diffraction analyzer (XRD) and transmission electron microscope (TEM) were used to analyze the resulting nanostructures. We have manufactured interdigitated electrode elements with Te, Zn-ZnO and Te/Zn-ZnO heterogeneous nanostructures, for the gas-sensing measurement at various temperatures and concentrations of NO2. Because The NO2 gas molecules would adsorb on material surface, causing resistance to change. Combining the nanotubes with high sensitivity of Zn-ZnO, to form P-N junctions Te/Zn-ZnO heterogeneous nanostructures in high resulted gas sensing performance at 100℃.