Deposition and Characterization of GZO, Cu2O, Ga2O3 Single and Multilayered Thin Films by Ion-Beam-Assisted Deposition (IBAD)
碩士 === 明志科技大學 === 材料工程系碩士班 === 103 === This study included two parts. In the first part, Ga-doped zinc oxide (GZO) and Cu2O thin films were deposited on glass substrates by Ion-Beam-Assisted Deposition (IBAD). The effects of ion beam discharge current and O2/Ar ratio on the structural, optical, and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7gd5sp |