Hybrid high-power impulse magnetron sputtering and radio frequency sputtering deposition of chromium vanadium nitride coating
碩士 === 明志科技大學 === 材料工程系碩士班 === 103 === High power impulse magnetron sputtering (HIPIMS) is a newly developed coating technology, characterized by its ultra-high peak current and peak power density to achieve unique thin film properties, such as high hardness, good adhesion and tribological performan...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96503039144601309831 |