Hybrid high-power impulse magnetron sputtering and radio frequency sputtering deposition of chromium vanadium nitride coating

• Main Authors: CHANG-PO-WEI, 張博為
• Other Authors: LEE-JYH-WEI
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/96503039144601309831

碩士 === 明志科技大學 === 材料工程系碩士班 === 103 === High power impulse magnetron sputtering (HIPIMS) is a newly developed coating technology, characterized by its ultra-high peak current and peak power density to achieve unique thin film properties, such as high hardness, good adhesion and tribological performance. In this study, a hybrid coating system consisting of high power impulse magnetron sputtering (HIPIMS) and radio frequency (RF) sputtering was used to deposit Cr-V-N coatings. It was found that the hybrid sputtering system can increase the deposition rate of CrVN coating. The peak power density of target increased from 0.39 to 1.42 kW/cm2 when the duty cycle decreased from 5 to 2.5%. The highest hardness of 18.9 GPa and the elastic modulus of 223 GPa were obtained when the peak power density of target reached to 1.42 kW /cm2 at 2.5 % (ton/toff  50/1950 μs) duty cycle and 500Hz pulse frequency. Some coating exhibited excellent adhesion and tribological properties. Wear rate was 0.27 10-6  mm3N-1m-1, indicating its excellent tribological properties, In this study, it was concluded that the addition of V in the CrN thin films had significant influence on the tribological performance. The lowest wear rate, 0.27 10-6  mm3N-1m-1, of CrVN coating was achieved.