Resistive Switching Characteristics of Titanium Oxynitride Thin Films by High Power Impulsed Magnetron Sputtering
碩士 === 明志科技大學 === 材料工程系碩士班 === 103 === High power impulse magnetron sputtering (HIPIMS) is a novel PVD technique. Typical for HIPIMS are the high peak power density (up to 1000 W/cm2), higher plasma density, high ionization fractions of the sputtered species, get the crystal structure without heat t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/486s3e |