Processing Optimization and Device Characteristics studies of a-IGZO Thin-Film Transistors
碩士 === 明新科技大學 === 電子工程系碩士班 === 103 === The study was focused on indium gallium zinc oxide (In-Ga-Zn-O, IGZO) thin film deposited at various powers and high-temperature N2 annealing on the glass substrate by using RF magnetron sputtering system. IGZO film characteristics were analysed by ellipsometer...
Main Authors: | Sheng-Kai, Fan, 范勝凱 |
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Other Authors: | Chi-Wen Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/69350602654565480687 |
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