Processing Optimization and Device Characteristics studies of a-IGZO Thin-Film Transistors

碩士 === 明新科技大學 === 電子工程系碩士班 === 103 === The study was focused on indium gallium zinc oxide (In-Ga-Zn-O, IGZO) thin film deposited at various powers and high-temperature N2 annealing on the glass substrate by using RF magnetron sputtering system. IGZO film characteristics were analysed by ellipsometer...

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Bibliographic Details
Main Authors: Sheng-Kai, Fan, 范勝凱
Other Authors: Chi-Wen Chen
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/69350602654565480687

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