Rapid Hydrolysis of Aluminum Nitride by Microwave
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系碩士在職專班 === 103 === Aluminum nitride (AlN) can be easily hydrolyzed. However, the product layer increases the diffusion resistance, resulting to the decrease of hydrolysis rate. In this study, the microwave-assisted hydrolysis method was proposed for the rapid hydrolys...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61054897742381890130 |