| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 103 === In this paper, we use Lithography process in micro-electromechanical system (MEMS) with fiber etching processes and SU-8 3050 photoresist of production long-period fiber grating (LPFG). Then, electroforming nickel process in the period structure fabricated the nickel to the long fiber grating with metal structures sensor LPFG.
In temperature demodulation experiment of metal-structure LPFG, we explored the size effect of the fiber diameter of metal-structure LPFG via differences photoresist structure with nickel metal structure coefficient of thermal expansion. In the heating process, the transmission loss becomes smaller, when the fiber diameter 47 m the sensitivity will be of 0.238 dB/℃, the R-squared value of 0.982 was reached.
In the magnetic field modulation experiments with metal structure LPFG sensors into the coil, the magnetic field is determined by the power supply, current changes in the magnetic field is about 11.19 mT/A. The magnetic field 0 mT increases to 87.5 mT, changes in the spectrum analysis sensors in different magnetic fields and external coil with copper pipes with submerged motor with water cooling exclude waste heat generated by the coil, the effective increase in the temperature controlled at 25℃ ~ 27℃, exclude the effect of temperature on the results of the experiment. From the experimental results, transmission loss changed with the magnetic field enhancement, an external magnetic field on nickel metal structure magnetostrictive effect, the structure of the fiber slight axial tension. When the fiber diameter 43 m the best sensitivity will be of -0.0606 dB/mT, the R-squared value is 0.998.
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