Annealing Effect on the Characteristics of Sn-O System Prepared by Hydrothermal Method

• Main Author: 鄭承哲
• Other Authors: 施仁斌
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/846s6f

碩士 === 逢甲大學 === 電子工程學系 === 103 === This dissertation proposed a hydrothermal with varying annealed temperatures and annealed condition technique for fabricating the porous Sn-O thin film on glass substrate to change mixed state and research their microstructure and material properties. In experimental, a Sn thin film was deposited on the clean glass substrate by sputtering, and the Sn thin film was annealed by teflon to form the Sn-O as the seed layer. Next, the Sn-O thin film was grown on the samples. The samples annealed by varying annealed temperatures and annealed condition. The SnCl4∙5H2O (0.1M) and NaOH (0.5M) were used in this hydrothermal process. Through the SEM analysis, the annealed Sn-O thin film was observed like flower-shapes and uniform. Besides , the Sn-O thin film could separate effectivity by annealed at O2 process. The hydrothermal method can easily be used for fabricating needed microstructures of Sn-O thin film. The hydrothermal–induced Sn-O thin film can be applied in gas sensor systems. Therefore, this preparation of the hydrothermal method is a simple, low cost process to exhibits a good development for fabricating Sn-O thin film .